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Journal: Micromachines, 2022
Volume: 13
Number: 1608
Article:
A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure
Authors:
by
Chaoxiang Yang, Bohao Hu, Liangyu Lu, Zekai Wang, Wenjuan Liu and Chengliang Sun
Link:
https://www.mdpi.com/2072-666X/13/10/1608
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