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Journal: Micromachines, 2022
Volume: 13
Number: 22
22
Article: A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions
Authors: by Shubham Shubham, Yoonho Seo, Vahid Naderyan, Xin Song, Anthony J. Frank, Jeremy Thomas Morley Greenham Johnson, Mark da Silva and Michael Pedersen
Link: https://www.mdpi.com/2072-666X/13/1/22

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