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Journal: Micromachines, 2022
Volume: 13
Number: 124
Article:
Power Reduction in Punch-Through Current-Based Electro-Thermal Annealing in Gate-All-Around FETs
Authors:
by
Min-Kyeong Kim, Yang-Kyu Choi and Jun-Young Park
Link:
https://www.mdpi.com/2072-666X/13/1/124
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