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Erratum: Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237
 
 

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Journal: Micromachines, 2022
Volume: 13
Number: 1

Article: Python-Based Open-Source Electro-Mechanical Co-Optimization System for MEMS Inertial Sensors
Authors: by Rui Amendoeira Esteves, Chen Wang and Michael Kraft
Link: https://www.mdpi.com/2072-666X/13/1/1

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