Erratum: Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237

Zhu, Yong; Pal, Jitendra

doi:10.3390/mi12111389

Open AccessErratum

Erratum: Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237

by

Yong Zhu

^1,*

and

Jitendra Pal

²

¹

Queensland Micro and Nanotechnology Centre, Griffith University, Nathan, QLD 4111, Australia

²

Wispry Inc., Irvine, CA 92618, USA

^*

Author to whom correspondence should be addressed.

Micromachines 2021, 12(11), 1389; https://doi.org/10.3390/mi12111389

Submission received: 5 November 2021 / Accepted: 5 November 2021 / Published: 12 November 2021

(This article belongs to the Special Issue Physical Microelectromechanical Systems (MEMS): Design, Modeling, Fabrication, and Characterization)

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Versions Notes

The authors would like to update the Figure 3 and Figure 7 to the published paper [1] as follows:

The changes do not affect the scientific results. We apologize for any inconvenience caused to the readers by these errors. The manuscript will be updated with a reference to this Erratum.

Reference

Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237. [Google Scholar] [CrossRef]

Figure 3. The simulated maximum temperature and displacement of the electrothermal actuator with various applied actuation voltages.

Figure 7. Scanning Electron Microscopy (SEM) photo of the fabricated switch. Au overlay is added to reduce the contact resistance and RF signal loss. Three stoppers ensure no contact and short circuit between movable electrode and holding electrode.

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Zhu, Y.; Pal, J. Erratum: Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237. Micromachines 2021, 12, 1389. https://doi.org/10.3390/mi12111389

AMA Style

Zhu Y, Pal J. Erratum: Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237. Micromachines. 2021; 12(11):1389. https://doi.org/10.3390/mi12111389

Chicago/Turabian Style

Zhu, Yong, and Jitendra Pal. 2021. "Erratum: Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237" Micromachines 12, no. 11: 1389. https://doi.org/10.3390/mi12111389

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Erratum: Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237

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