Erratum: Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237

Yong Zhu; Jitendra Pal

doi:10.3390/mi12111389

and

¹

Queensland Micro and Nanotechnology Centre, Griffith University, Nathan, QLD 4111, Australia

²

Wispry Inc., Irvine, CA 92618, USA

^*

Author to whom correspondence should be addressed.

Micromachines2021, 12(11), 1389;https://doi.org/10.3390/mi12111389

This article belongs to the Special Issue Physical Microelectromechanical Systems (MEMS): Design, Modeling, Fabrication, and Characterization

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The authors would like to update the Figure 3 and Figure 7 to the published paper [1] as follows:

Figure 3. The simulated maximum temperature and displacement of the electrothermal actuator with various applied actuation voltages.

Figure 7. Scanning Electron Microscopy (SEM) photo of the fabricated switch. Au overlay is added to reduce the contact resistance and RF signal loss. Three stoppers ensure no contact and short circuit between movable electrode and holding electrode.

The changes do not affect the scientific results. We apologize for any inconvenience caused to the readers by these errors. The manuscript will be updated with a reference to this Erratum.

Reference

Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237. [Google Scholar] [CrossRef]

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Erratum: Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237

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