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Journal: Micromachines, 2021
Volume: 12
Number: 891
Article:
Analysis of Optical Diffraction Profiles Created by Phase-Modulating MEMS Micromirror Arrays
Authors:
by
Tarek Mohammad, Siyuan He and Ridha Ben Mrad
Link:
https://www.mdpi.com/2072-666X/12/8/891
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