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Journal: Micromachines, 2021
Volume: 12
Number: 580

Article: Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate
Authors: by Luisa Berger, Jakub Jurczyk, Katarzyna Madajska, Iwona B. Szymańska, Patrik Hoffmann and Ivo Utke
Link: https://www.mdpi.com/2072-666X/12/5/580

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