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Journal: Micromachines, 2021
Volume: 12
Number: 501
Article:
Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching
Authors:
by
Angela M. Baracu, Christopher A. Dirdal, Andrei M. Avram, Adrian Dinescu, Raluca Muller, Geir Uri Jensen, Paul Conrad Vaagen Thrane and Hallvard Angelskår
Link:
https://www.mdpi.com/2072-666X/12/5/501
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