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Journal: Micromachines, 2021
Article: Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching
Authors: by Angela M. Baracu, Christopher A. Dirdal, Andrei M. Avram, Adrian Dinescu, Raluca Muller, Geir Uri Jensen, Paul Conrad Vaagen Thrane and Hallvard Angelskår
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