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Journal: Micromachines, 2021
Volume: 12
Number: 279
Article:
6-Axis Stress Tensor Sensor Using Multifaceted Silicon Piezoresistors
Authors:
by
Kentaro Noda, Jian Sun and Isao Shimoyama
Link:
https://www.mdpi.com/2072-666X/12/3/279
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