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Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

1
Micro and Nanoelectronics Department, MEPhI (Moscow Engineering Physics Institute), National Research Nuclear University, 115409 Moscow, Russia
2
Fraunhofer IKTS Institute, 01277 Dresden, Germany
3
KERAFOL Keramische Folien GmbH & Co. KG, 92676 Eschenbach, Germany
*
Author to whom correspondence should be addressed.
Academic Editor: Shuting Lei
Micromachines 2021, 12(12), 1440; https://doi.org/10.3390/mi12121440
Received: 28 October 2021 / Revised: 19 November 2021 / Accepted: 23 November 2021 / Published: 25 November 2021
The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping. View Full-Text
Keywords: laser micromachining; printing technology; platinum ink; thin ceramic membrane laser micromachining; printing technology; platinum ink; thin ceramic membrane
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MDPI and ACS Style

Samotaev, N.; Oblov, K.; Dzhumaev, P.; Fritsch, M.; Mosch, S.; Vinnichenko, M.; Trofimenko, N.; Baumgärtner, C.; Fuchs, F.-M.; Wissmeier, L. Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors. Micromachines 2021, 12, 1440. https://doi.org/10.3390/mi12121440

AMA Style

Samotaev N, Oblov K, Dzhumaev P, Fritsch M, Mosch S, Vinnichenko M, Trofimenko N, Baumgärtner C, Fuchs F-M, Wissmeier L. Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors. Micromachines. 2021; 12(12):1440. https://doi.org/10.3390/mi12121440

Chicago/Turabian Style

Samotaev, Nikolay, Konstantin Oblov, Pavel Dzhumaev, Marco Fritsch, Sindy Mosch, Mykola Vinnichenko, Nikolai Trofimenko, Christoph Baumgärtner, Franz-Martin Fuchs, and Lena Wissmeier. 2021. "Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors" Micromachines 12, no. 12: 1440. https://doi.org/10.3390/mi12121440

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