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Journal: Micromachines, 2021
Volume: 12
Number: 1328

Article: Multi-Foci Division of Nonlinear Energy Absorption on Ultrashort Pulse Laser Singulation of Sapphire Wafers
Authors: by Celescia Siew Mun Lye, Zhongke Wang and Yee Cheong Lam
Link: https://www.mdpi.com/2072-666X/12/11/1328

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