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        Journal: Micromachines, 2021
        Volume: 12 
                	Number: 1311 
                
        
        Article:
        Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared 
        Authors: 
       	by
                    Qifeng Qiao, Haoyang Sun, Xinmiao Liu, Bowei Dong, Ji Xia, Chengkuo Lee and Guangya Zhou        
        Link:
        https://www.mdpi.com/2072-666X/12/11/1311
        
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