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Journal: Micromachines, 2021
Volume: 12
Number: 1311
Article:
Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared
Authors:
by
Qifeng Qiao, Haoyang Sun, Xinmiao Liu, Bowei Dong, Ji Xia, Chengkuo Lee and Guangya Zhou
Link:
https://www.mdpi.com/2072-666X/12/11/1311
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