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Journal: Micromachines, 2021
Volume: 12
Number: 1188
1188
Article: Nanoscale-Precision Removal of Copper in Integrated Circuits Based on a Hybrid Process of Plasma Oxidation and Femtosecond Laser Ablation
Authors: by Shuai Wang, Yaoyu Wang, Shizhuo Zhang, Lingfeng Wang, Shuai Chen, Huai Zheng, Chen Zhang, Sheng Liu, Gary J. Cheng and Feng Liu
Link: https://www.mdpi.com/2072-666X/12/10/1188

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