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Journal: Micromachines, 2021
Volume: 12
Number: 56
56
Article: Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology
Authors: by Lukang Wang, You Zhao, Yulong Zhao, Yu Yang, Taobo Gong, Le Hao and Wei Ren
Link: https://www.mdpi.com/2072-666X/12/1/56

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