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Journal: Micromachines, 2021
Volume: 12
Number: 13
Article:
Capacitive Based Micromachined Resonators for Low Level Mass Detection
Authors:
by
Muhammad Umair Nathani, Haleh Nazemi, Calvin Love, Yameema Babu Lopez, Siddharth Swaminathan and Arezoo Emadi
Link:
https://www.mdpi.com/2072-666X/12/1/13
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