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Journal: Micromachines, 2020
Volume: 11
Number: 744
744
Article: Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching
Authors: by Tae Kyoung Kim, Jee-Hwan Bae, Juyoung Kim, Min Kyung Cho, Yu-Chan Kim, Sungho Jin and Dongwon Chun
Link: https://www.mdpi.com/2072-666X/11/8/744

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