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Journal: Micromachines, 2020
Volume: 11
Number: 724
Article:
Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication
Authors:
by
Bo Li, Cun Li, Yulong Zhao, Chao Han and Quanwei Zhang
Link:
https://www.mdpi.com/2072-666X/11/8/724
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