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Journal: Micromachines, 2020
Volume: 11
Number: 724

Article: Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication
Authors: by Bo Li, Cun Li, Yulong Zhao, Chao Han and Quanwei Zhang
Link: https://www.mdpi.com/2072-666X/11/8/724

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