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Open AccessArticle

Wetting Properties of Transparent Anatase/Rutile Mixed Phase Glancing Angle Magnetron Sputtered Nano-TiO2 Films

Department of Chemical Engineering, University of Patras, GR-26504 Patras, Greece
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Micromachines 2020, 11(6), 616; https://doi.org/10.3390/mi11060616
Received: 8 June 2020 / Revised: 21 June 2020 / Accepted: 22 June 2020 / Published: 25 June 2020
(This article belongs to the Special Issue Micro/Nano-surfaces: Fabrication and Applications)
Transparent polycrystalline TiO2 thin films have been deposited on unheated glass substrates using RF reactive magnetron sputtering. Depositions were carried out at different glancing angles and with different total gas mixture pressures. The variation of these parameters affected the crystal phase composition and the surface morphology. Depending on the glancing angle and the pressure, rutile, mixed anatase/ rutile and pure anatase were deposited at low substrate temperature. Both hydrophilic and hydrophobic TiO2 were obtained, exhibiting fast photoconversion to superhydrophilic upon UV irradiation. The effect of the materials physicochemical properties on the wettability and rate of the UV induced superhydrophilicity is evaluated. View Full-Text
Keywords: mixed phase TiO2; glancing angle; RF magnetron sputtering; reversible wettability mixed phase TiO2; glancing angle; RF magnetron sputtering; reversible wettability
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Vrakatseli, V.; Farsari, E.; Mataras, D. Wetting Properties of Transparent Anatase/Rutile Mixed Phase Glancing Angle Magnetron Sputtered Nano-TiO2 Films. Micromachines 2020, 11, 616.

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