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Journal: Micromachines, 2020
Volume: 11
Number: 561
561
Article: Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology
Authors: by Yiyuan Zhao, Henk-Willem Veltkamp, Thomas V. P. Schut, Remco G. P. Sanders, Bogdan Breazu, Jarno Groenesteijn, Meint J. de Boer, Remco J. Wiegerink and Joost C. Lötters
Link: https://www.mdpi.com/2072-666X/11/6/561

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