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Article

Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns

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Department of Cogno Mechatronics Engineering, Pusan National University, Busan 46241, Korea
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Interdisciplinary Department for Advanced Innovative Manufacturing Engineering, Pusan National University, Busan 46241, Korea
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Department of Optics and Mechatronics Engineering, Pusan National University, Busan 46241, Korea
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(5), 476; https://doi.org/10.3390/mi11050476
Received: 9 April 2020 / Revised: 26 April 2020 / Accepted: 28 April 2020 / Published: 30 April 2020
Three-dimensional (3-D) porous graphitic structures have great potential for sensing applications due to their conductive carbon networks and large surface area. In this work, we present a method for facile fabrication of hair-like laser induced graphene (LIG) patterns using a laser scribing system equipped with a 355 nm pulsed laser. The polyimide (PI) film was positioned on a defocused plane and irradiated at a slow scanning speed using a misaligned laser beam. These patterns have the advantages of a large surface area and abundant oxidation groups. We have applied the hair-like LIG patterns to a humidity sensor. The humidity sensor showed good sensitivity characteristics and a large amount of electronic carriers can be stored. View Full-Text
Keywords: 3-D porous structures of graphene (3-D PGS); laser induced graphene (LIG); laser direct writing (LDW); hair-like; humidity sensor; polyimide (PI) 3-D porous structures of graphene (3-D PGS); laser induced graphene (LIG); laser direct writing (LDW); hair-like; humidity sensor; polyimide (PI)
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MDPI and ACS Style

Lee, J.-U.; Ma, Y.-W.; Jeong, S.-Y.; Shin, B.-S. Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns. Micromachines 2020, 11, 476. https://doi.org/10.3390/mi11050476

AMA Style

Lee J-U, Ma Y-W, Jeong S-Y, Shin B-S. Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns. Micromachines. 2020; 11(5):476. https://doi.org/10.3390/mi11050476

Chicago/Turabian Style

Lee, Jun-Uk, Yong-Won Ma, Sung-Yeob Jeong, and Bo-Sung Shin. 2020. "Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns" Micromachines 11, no. 5: 476. https://doi.org/10.3390/mi11050476

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