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Fabrication of Ultra-High Aspect Ratio (>420:1) Al2O3 Nanotube Arraysby Sidewall TransferMetal Assistant Chemical Etching
 
 

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Journal: Micromachines, 2020
Volume: 11
Number: 402

Article: Silicon Conical Structures by Metal Assisted Chemical Etching
Authors: by Oscar Pérez-Díaz and Enrique Quiroga-González
Link: https://www.mdpi.com/2072-666X/11/4/402

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