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Open AccessArticle

μ-Coriolis Mass Flow Sensor with Resistive Readout

1
MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
2
Bronkhorst High-Tech BV, Nijverheidsstraat 1A, 7261 AK Ruurlo, The Netherlands
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(2), 184; https://doi.org/10.3390/mi11020184
Received: 28 January 2020 / Revised: 7 February 2020 / Accepted: 8 February 2020 / Published: 11 February 2020
(This article belongs to the Special Issue MFHS 2019)
This paper presents a μ -Coriolis mass flow sensor with resistive readout. Instead of measuring a net displacement such as in a capacitive readout, a resistive readout detects the deformation of the suspended micro-fluidic channel. It allows for actuation at much higher amplitudes than for a capacitive readout, resulting in correspondingly larger Coriolis forces in response to fluid flow. A resistive readout can be operated in two actuation vibrational modes. A capacitive readout can only be operated in one of these two modes, which is more sensitive to external disturbances. Three types of devices have been realized. We present measurement results for all three devices. One device clearly outperforms the other two, with a flow sensitivity of 2.22 / ( g / h ) and a zero-flow stability of 0.02 g / h over 30 min. Optimization of the metal strain gauges and/or implementation of poly-Silicon strain gauges could further improve performance.
Keywords: coriolis; flow sensor; flow; mass flow; strain gauge; resistive; resonator; channel coriolis; flow sensor; flow; mass flow; strain gauge; resistive; resonator; channel
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MDPI and ACS Style

Schut, T.; Wiegerink, R.; Lötters, J. μ-Coriolis Mass Flow Sensor with Resistive Readout. Micromachines 2020, 11, 184.

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