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Micromachines
Volume 11
Issue 12
10.3390/mi11121130
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Journal: Micromachines, 2020
Volume: 11
Number: 1130

Article: Q-Factor Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonator by Phononic Crystal-Reflector Composite Structure
Authors: by Jiacheng Liu, Temesgen Bailie Workie, Ting Wu, Zhaohui Wu, Keyuan Gong, Jingfu Bao and Ken-ya Hashimoto
Link: https://www.mdpi.com/2072-666X/11/12/1130

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