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Journal: Micromachines, 2020
Volume: 11
Number: 883
883
Article: Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers
Authors: by Thilo Sandner, Eric Gaumont, Thomas Graßhoff, Andreas Rieck, Tobias Seifert, Gerald Auböck and Jan Grahmann
Link: https://www.mdpi.com/2072-666X/11/10/883

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