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A Design Methodology of Digital Control System for MEMS Gyroscope Based on Multi-Objective Parameter Optimization

Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China
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Micromachines 2020, 11(1), 75; https://doi.org/10.3390/mi11010075
Received: 14 December 2019 / Revised: 7 January 2020 / Accepted: 8 January 2020 / Published: 9 January 2020
(This article belongs to the Section A:Physics)
This paper presents a novel multi-objective parameter optimization method based on the genetic algorithm (GA) and adaptive moment estimation (Adam) algorithm for the design of a closed-loop control system for the sense mode of a Microelectromechanical systems (MEMS) gyroscope. The proposed method can improve the immunity of the control system to fabrication tolerances and external noise. The design procedure starts by deriving a parameterized model of the closed-loop of the sense mode. The loop parameters are then optimized by the GA. Finally, the ensemble of optimized loop parameters is tested by Monte Carlo analysis to obtain a robust optimal solution. Simultaneously, the Adam-least mean square (LMS) demodulator, which is appropriate for the demodulation of very noisy signals, is also presented. Compared with the traditional method, the time consumption of the design process is reduced significantly. The digital control system is implemented by the print circuit board based on embedded Field Programmable Gate Array (FPGA). The experimental results show that the optimized control loop has achieved a better performance, the system bandwidth in open-loop and optimal closed-loop control system is about 23 Hz and 101 Hz, respectively. Compared to a non-optimized closed-loop system, the bias instability reduced from 0.0015°/s to 7.52 × 10−4°/s, the scale factor increased from 17.7 mV/(°/s) to 23 mV/(°/s) and the non-linearity of the scale factor reduced from 0.008452% to 0.006156%. View Full-Text
Keywords: MEMS gyroscope; closed-loop system; genetic algorithm; Monte Carlo analysis; Adam-LMSD algorithm MEMS gyroscope; closed-loop system; genetic algorithm; Monte Carlo analysis; Adam-LMSD algorithm
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Gu, H.; Su, W.; Zhao, B.; Zhou, H.; Liu, X. A Design Methodology of Digital Control System for MEMS Gyroscope Based on Multi-Objective Parameter Optimization. Micromachines 2020, 11, 75.

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