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Journal: Micromachines, 2019
Volume: 10
Number: 473

Article: On-Chip Integration of Pressure Plus 2-Axis (X/Z) Acceleration Composite TPMS Sensors with a Single-Sided Bulk-Micromachining Technique
Authors: by Jiachou Wang and Fang Song
Link: https://www.mdpi.com/2072-666X/10/7/473

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