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Design, Fabrication and Mass-spectrometric Studies of a Micro Ion Source for High-Field Asymmetric Waveform Ion Mobility Spectrometry

School of Life and Environmental Sciences, GuiLin University of Electronic Technology, Guilin 541004, China
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Micromachines 2019, 10(5), 286; https://doi.org/10.3390/mi10050286
Received: 20 February 2019 / Revised: 14 April 2019 / Accepted: 25 April 2019 / Published: 27 April 2019
(This article belongs to the Special Issue 10th Anniversary of Micromachines)
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Abstract

A needle-to-cylinder electrode, adopted as an ion source for high-field asymmetric ion mobility spectrometry (FAIMS), is designed and fabricated by lithographie, galvanoformung and abformung (LIGA) technology. The needle, with a tip diameter of 20 μm and thickness of 20 μm, and a cylinder, with a diameter of 400 μm, were connected to the negative high voltage and ground, respectively. A negative corona and glow discharge were realized. For acetone with a density of 99.7 ppm, ethanol with a density of 300 ppm, and acetic ether with a density of 99.3 ppm, the sample gas was ionized by the needle-to-cylinder chip and the ions were detected by an LTQ XL™ (Thermo Scientific Corp.) mass spectrometer. The mass spectra show that the ions are mainly the protonated monomer, the proton bound dimer, and an ion-H2O molecule cluster. In tandem with a FAIMS system, the FAIMS spectra show that the resolving power increases with an increase in the RF voltage. The obtained experimental results showed that the micro needle-to-cylinder chip may serve as a miniature, low cost and non-radioactive ion source for FAIMS. View Full-Text
Keywords: needle-to-cylinder; lithographie, galvanoformung and abformung (LIGA); ion source; high-field asymmetric ion mobility spectrometry (FAIMS) needle-to-cylinder; lithographie, galvanoformung and abformung (LIGA); ion source; high-field asymmetric ion mobility spectrometry (FAIMS)
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Li, H.; Yun, H.; Du, X.; Guo, C.; Zeng, R.; Jiang, Y.; Chen, Z. Design, Fabrication and Mass-spectrometric Studies of a Micro Ion Source for High-Field Asymmetric Waveform Ion Mobility Spectrometry. Micromachines 2019, 10, 286.

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