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Journal: Micromachines, 2019
Volume: 10
Number: 127

Article: Incorporation of Phosphorus Impurities in a Silicon Nanowire Transistor with a Diameter of 5 nm
Authors: by Yanfeng Jiang, Wenjie Wang, Zirui Wang and Jian-Ping Wang
Link: https://www.mdpi.com/2072-666X/10/2/127

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