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Open AccessReview

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

1
School of Control Engineering, Northeastern University at Qinhuangdao, Qinhuangdao 066004, China
2
Department of Mechanical Engineering, City University of Hong Kong, Kowloon, Hong Kong 999077, China
*
Authors to whom correspondence should be addressed.
Micromachines 2019, 10(12), 843; https://doi.org/10.3390/mi10120843
Received: 29 October 2019 / Revised: 23 November 2019 / Accepted: 28 November 2019 / Published: 2 December 2019
Micromanipulation is an interdisciplinary technology that integrates advanced knowledge of microscale/nanoscale science, mechanical engineering, electronic engineering, and control engineering. Over the past two decades, it has been widely applied in the fields of MEMS (microelectromechanical systems), bioengineering, and microdevice integration and manufacturing. Microvision servoing is the basic tool for enabling the automatic and precise micromanipulation of microscale/nanoscale entities. However, there are still many problems surrounding microvision servoing in theory and the application of this technology’s micromanipulation processes. This paper summarizes the research, development status, and practical applications of critical components of microvision servoing for micromanipulation, including geometric calibration, autofocus techniques, depth information, and visual servoing control. Suggestions for guiding future innovation and development in this field are also provided in this review.
Keywords: micromanipulation; calibration; autofocus; visual servoing control; microlens micromanipulation; calibration; autofocus; visual servoing control; microlens
MDPI and ACS Style

Sha, X.; Sun, H.; Zhao, Y.; Li, W.; Li, W.J. A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly. Micromachines 2019, 10, 843.

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