Design and Characteristic Analysis of a MEMS Piezo-Driven Recirculating Inkjet Printhead Using Lumped Element Modeling
Abstract
:1. Introduction
2. Materials and Methods
2.1. Proposed Design
2.2. Lumped Element Model
2.3. FEM Simulations
3. Results and Discussion
3.1. System Response
3.2. Analysis of the Helmholtz Resonance Frequency
3.3. Analysis of Pressure and Velocity
3.4. Waveform Effect on the System’s Response
3.5. Hydro-Acoustic Cross-Talk Effect
4. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
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Pressure Chamber | Restrictor | Nozzle | ||||||
---|---|---|---|---|---|---|---|---|
Length (μm) | Width (μm) | Depth (μm) | Length (μm) | Width (μm) | Depth (μm) | Length (μm) | Inlet Radius (μm) | Outlet Radius (μm) |
870 | 53 | 73 | 140 | 12.5 | 73 | 33 | 16 | 8 |
PZT | Platinum | Silicon | SiO2 | |||||
---|---|---|---|---|---|---|---|---|
Width (μm) | Thickness (μm) | Width (μm) | Thickness (μm) | Width (μm) | Thickness (μm) | Width (μm) | Thickness (μm) | |
Upper | Lower | |||||||
44 | 2 | 44 | 0.11 | 0.15 | 53 | 1.1 | 53 | 0.5 |
Parameters | Formulas and Simulations | Values | |
---|---|---|---|
Pressure chamber | |||
FEM | |||
Nozzle | |||
FEM | |||
Restrictor | |||
FEM |
Density (kg·m−3) | Surface Tension (N/m) | Viscosity (Pa·s) |
---|---|---|
1102 | 34.68 × 10−3 | 5.95 × 10−3 |
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Shah, M.A.; Lee, D.-G.; Hur, S. Design and Characteristic Analysis of a MEMS Piezo-Driven Recirculating Inkjet Printhead Using Lumped Element Modeling. Micromachines 2019, 10, 757. https://doi.org/10.3390/mi10110757
Shah MA, Lee D-G, Hur S. Design and Characteristic Analysis of a MEMS Piezo-Driven Recirculating Inkjet Printhead Using Lumped Element Modeling. Micromachines. 2019; 10(11):757. https://doi.org/10.3390/mi10110757
Chicago/Turabian StyleShah, Muhammad Ali, Duck-Gyu Lee, and Shin Hur. 2019. "Design and Characteristic Analysis of a MEMS Piezo-Driven Recirculating Inkjet Printhead Using Lumped Element Modeling" Micromachines 10, no. 11: 757. https://doi.org/10.3390/mi10110757
APA StyleShah, M. A., Lee, D.-G., & Hur, S. (2019). Design and Characteristic Analysis of a MEMS Piezo-Driven Recirculating Inkjet Printhead Using Lumped Element Modeling. Micromachines, 10(11), 757. https://doi.org/10.3390/mi10110757