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Journal: Micromachines, 2010
Volume: 1
Number: 68
Article:
Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams
Authors:
by
Darcy T. Haluzan, David M. Klymyshyn, Sven Achenbach and Martin Börner
Link:
https://www.mdpi.com/2072-666X/1/2/68
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