Experimental and Numerical Study on the Characteristics of the Thermal Design of a Large-Area Hot Plate for Nanoimprint Equipment
Abstract
:1. Introduction
2. Experimental and Analysis Method
2.1. Experimental Setup and Method
2.2. Numerical Method and Analytical Model
2.3. Control Variables Setting
3. Results and Analysis
3.1. Heating Numerical Analysis Characteristics
3.2. Cooling Numerical Analysis Characteristics
3.3. Comparison of Numerical and Experimental Results
4. Conclusions
- (1)
- Based on the conceptual design, we developed a heating model with a controller to realize the unsteady temperature behavior. The PID algorithm was applied to the controller and its operability was evaluated by changing the values of Pgain, Igain, and Dgain. For cooling, hot plate cooling models incorporating and not incorporating heat pipes were developed in the same manner as the study model. When heat pipes are applied, indirect cooling is performed by cooling their ends.
- (2)
- A computational analysis was performed using a heating model including a controller that applies a stainless steel (STS304) material for the large-area expansion of the hot plate. The results demonstrated that the 2 cm ends of the cartridge heaters were not heated, and the thermal conductivity of the stainless steel was low. Thus, the maximum temperature difference at nine measurement points of the hot plate was 20 °C. For cooling, cooling holes were formed; when using nitrogen and water as the coolants and applying counter-flow, the temperature difference was 20 °C and 32.5 °C, respectively. These results confirmed issues with heating and cooling through conventional methods. To address the above problems, a new heating method was proposed applying heat pipes, and for the cooling method, an indirect cooling method was proposed in which the heat pipe ends are cooled.
- (3)
- When using a stainless steel (STS304) hot plate for large-area hot plate expansion, the heat pipes were inserted in the direction of the cartridge heaters to address the problems that may occur when expanding the hot plate into a large area. As a result, the heating rate was 40 °C/min and the temperature uniformity was less than 1% of the maximum working temperature of 200 °C. For cooling, when considering pressure and using air as the coolant for the ends, a cooling rate of 20 °C/min and thermal performance of less than 13.2 °C (less than 7%) based on the maximum temperature were obtained. These results were similar to the experimental results.
Author Contributions
Funding
Conflicts of Interest
References
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Area | Temperature difference Max. Temp.–Min. Temp. | Working area (cm2) |
A | 13.3 | 200 × 200 |
B | 11.0 | 190 × 190 |
C | 9.0 | 180 × 180 |
D | 1.0 | 170 × 170 |
Area | Temperature difference Max. Temp.–Min. Temp. | Working area (cm2) |
A | 4.1 | 200 × 200 |
B | 3.5 | 190 × 190 |
C | 2.9 | 180 × 180 |
D | 1.3 | 170 × 170 |
NIL Method | Process Details | Mold/Substrate | Resist Materials |
---|---|---|---|
Thermal NIL [19,20] | Thermal annealing of polymers at temperatures up to 50 °C above the glass transition temperature. | High hardness molds (Young’s modulus should be higher than that of resist): silicon, glasses, quartz, nickel, ceramics, Al oxide Note: thermal expansion coefficient of mold and substrate should match | Only thermoplastic polymers: polystyrene (PS), poly(methyl-methacrylate) (PMMA), polycarbonate (PC), polyethylene terephthalate (PET), siloxane copolymers (PDMS-b-PS, PDMS-g-PMMA), specified spin-on polymers |
UV NIL at room temperature [4,5,6,21,22] | UV, EUV exposure | UV-transparent materials: quartz glass; soft stamps are more common for UV NIL: polydimethylsiloxane (PDMS), polyvinyl chloride (PVC), PMMA | Low viscosity UV-sensitive materials, ideally with low volume shrinkage after polymerization—usually liquid functionalized monomers or oligomers, CARs (Chemical amplified resists) |
UV NIL + thermal annealing [23,24] | Simultaneous UV exposure and substrate heating | UV-transparent materials | UV-curable polymers with better surface coverage and lower imprint temperatures as for T-NIL can be used |
Items | Model | Specifications | Remarks |
---|---|---|---|
Data acquisition system | Agilent 34970A | Two 8-bit digital I/O ports, 26-bit Event Counter, Two 16-bit Analog outputs | Data logger of temperature |
Power supply | WYG 1C 20Z4 | 90~240 VAC | 8.3 ± 1 ms (response time) |
Feedback controller | TZN4S | PID (Proportional integral derivative) control | Temperature controller |
Temperature sensor | K-type thermocouple | 2.0 mm diameter | ±1.5 °C |
Mark | Length [mm] |
---|---|
G | 20 |
L | 240 |
Lhp | 340 |
S | 12 |
Dhp | 6 |
Dch | 6 |
H | 20 |
Hth | 8 |
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Park, G.; Lee, C. Experimental and Numerical Study on the Characteristics of the Thermal Design of a Large-Area Hot Plate for Nanoimprint Equipment. Sustainability 2019, 11, 4795. https://doi.org/10.3390/su11174795
Park G, Lee C. Experimental and Numerical Study on the Characteristics of the Thermal Design of a Large-Area Hot Plate for Nanoimprint Equipment. Sustainability. 2019; 11(17):4795. https://doi.org/10.3390/su11174795
Chicago/Turabian StylePark, Gyujin, and Changhee Lee. 2019. "Experimental and Numerical Study on the Characteristics of the Thermal Design of a Large-Area Hot Plate for Nanoimprint Equipment" Sustainability 11, no. 17: 4795. https://doi.org/10.3390/su11174795