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Journal: Materials, 2015
Volume: 8
Number: 1204

Article: GaN Micromechanical Resonators with Meshed Metal Bottom Electrode
Authors: by Azadeh Ansari, Che-Yu Liu, Chien-Chung Lin, Hao-Chung Kuo, Pei-Cheng Ku and Mina Rais-Zadeh
Link: https://www.mdpi.com/1996-1944/8/3/1204

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