Next Article in Journal
Surface Engineering and Patterning Using Parylene for Biological Applications
Next Article in Special Issue
End-Grafted Polymer Chains onto Inorganic Nano-Objects
Previous Article in Journal
Application of Diamond Nanoparticles in Low-Energy Neutron Physics
Previous Article in Special Issue
Layer-by-Layer Method for the Synthesis and Growth of Surface Mounted Metal-Organic Frameworks (SURMOFs)
Open AccessReview

Hybrid Integrated Platforms for Silicon Photonics

Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA, 93106, USA
Photonics Research Group, IMEC - Ghent University, Sint-Pietersnieuwstraat 41, B-9000 Ghent, Belgium
Author to whom correspondence should be addressed.
Materials 2010, 3(3), 1782-1802;
Received: 1 February 2010 / Revised: 3 March 2010 / Accepted: 11 March 2010 / Published: 12 March 2010
(This article belongs to the Special Issue Inorganic-Organic Hybrid Materials)
A review of recent progress in hybrid integrated platforms for silicon photonics is presented. Integration of III-V semiconductors onto silicon-on-insulator substrates based on two different bonding techniques is compared, one comprising only inorganic materials, the other technique using an organic bonding agent. Issues such as bonding process and mechanism, bonding strength, uniformity, wafer surface requirement, and stress distribution are studied in detail. The application in silicon photonics to realize high-performance active and passive photonic devices on low-cost silicon wafers is discussed. Hybrid integration is believed to be a promising technology in a variety of applications of silicon photonics. View Full-Text
Keywords: hybrid integration; wafer bonding; silicon photonics hybrid integration; wafer bonding; silicon photonics
Show Figures

Figure 1

MDPI and ACS Style

Liang, D.; Roelkens, G.; Baets, R.; Bowers, J.E. Hybrid Integrated Platforms for Silicon Photonics. Materials 2010, 3, 1782-1802.

Show more citation formats Show less citations formats

Article Access Map by Country/Region

Only visits after 24 November 2015 are recorded.
Back to TopTop