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Journal: Materials, 2026
Volume: 19
Number: 1734

Article: The Mechanism of Ruthenium Oxide Catalyzed Electroless Etching of Silicon in Oxidizing HF Solution
Authors: by Bing Bai, Yingqi Li, Wei Xu, Peiao Lu, Jiakun Luo, Jinyu Wu and Kui-Qing Peng
Link: https://www.mdpi.com/1996-1944/19/9/1734

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