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Journal: Materials, 2026
Volume: 19
Number: 56
56
Article: Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical Behavior
Authors: by Haneul Kim, Jungyeon Kim, Young Woo Kang, Taeho Lee, Min-Woo Kim, Tae Joong Ha, Hye-Keun Oh and Jinho Ahn
Link: https://www.mdpi.com/1996-1944/19/1/56

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