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Journal: Materials, 2025
Volume: 18
Number: 4681
Article:
The Influence of Reactive Ion Etching Chemistry on the Initial Resistance and Cycling Stability of Line-Type (Bridge) Phase-Change Memory Devices
Authors:
by
Abbas Espiari, Henriette Padberg, Alexander Kiehn, Kristoffer Schnieders, Jiayuan Zhang, Gregor Mussler, Stefan Wiefels, Abdur Rehman Jalil and Detlev Grützmacher
Link:
https://www.mdpi.com/1996-1944/18/20/4681
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