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Journal: Materials, 2024
Volume: 17
Number: 1817
Article:
Novel Probability Density Function of Pad Asperity by Wear Effect over Time in Chemical Mechanical Planarization
Authors:
by
Seonho Jeong, Yeongil Shin, Jongmin Jeong, Seunghun Jeong and Haedo Jeong
Link:
https://www.mdpi.com/1996-1944/17/8/1817
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