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Journal: Materials, 2024
Volume: 17
Number: 627
Article:
Demonstration of 10 nm Ferroelectric Al0.7Sc0.3N-Based Capacitors for Enabling Selector-Free Memory Array
Authors:
by
Li Chen, Chen Liu, Hock Koon Lee, Binni Varghese, Ronald Wing Fai Ip, Minghua Li, Zhan Jiang Quek, Yan Hong, Weijie Wang, Wendong Song, Huamao Lin and Yao Zhu
Link:
https://www.mdpi.com/1996-1944/17/3/627
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