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Journal: Materials, 2024
Volume: 17
Number: 6067
Article:
Evolution of Chemical, Structural, and Mechanical Properties of Titanium Nitride Films with Different Thicknesses Fabricated Using Pulsed DC Magnetron Sputtering
Authors:
by
Wei Mao, Runze Qi, Jiali Wu, Zhe Zhang and Zhanshan Wang
Link:
https://www.mdpi.com/1996-1944/17/24/6067
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