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Journal: Materials, 2024
Volume: 17
Number: 5453

Article: Water Vapor-Impermeable AlON/HfOx Bilayer Films Deposited by Hybrid High-Power Impulse Magnetron Sputtering/Radio-Frequency Magnetron Sputtering Processes
Authors: by Li-Chun Chang and Sheng-En Lin
Link: https://www.mdpi.com/1996-1944/17/22/5453

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