Yan, X.; Sun, M.; Ji, J.; He, Z.; Zhang, J.; Sun, W.
Epitaxy of (11–22) AlN Films on a Sputtered Buffer Layer with Different Annealing Temperatures via Hydride Vapour Phase Epitaxy. Materials 2024, 17, 327.
https://doi.org/10.3390/ma17020327
AMA Style
Yan X, Sun M, Ji J, He Z, Zhang J, Sun W.
Epitaxy of (11–22) AlN Films on a Sputtered Buffer Layer with Different Annealing Temperatures via Hydride Vapour Phase Epitaxy. Materials. 2024; 17(2):327.
https://doi.org/10.3390/ma17020327
Chicago/Turabian Style
Yan, Xuejun, Maosong Sun, Jianli Ji, Zhuokun He, Jicai Zhang, and Wenhong Sun.
2024. "Epitaxy of (11–22) AlN Films on a Sputtered Buffer Layer with Different Annealing Temperatures via Hydride Vapour Phase Epitaxy" Materials 17, no. 2: 327.
https://doi.org/10.3390/ma17020327
APA Style
Yan, X., Sun, M., Ji, J., He, Z., Zhang, J., & Sun, W.
(2024). Epitaxy of (11–22) AlN Films on a Sputtered Buffer Layer with Different Annealing Temperatures via Hydride Vapour Phase Epitaxy. Materials, 17(2), 327.
https://doi.org/10.3390/ma17020327