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Journal: Materials, 2023
Volume: 16
Number: 2539
2539
Article: Studies of Electrical Parameters and Thermal Stability of HiPIMS Hafnium Oxynitride (HfO_xN_y) Thin Films
Authors: by Mirosław Puźniak, Wojciech Gajewski, Aleksandra Seweryn, Marcin T. Klepka, Bartłomiej S. Witkowski, Marek Godlewski and Robert Mroczyński
Link: https://www.mdpi.com/1996-1944/16/6/2539

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