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Article

The Piezoresponse in WO3 Thin Films Due to N2-Filled Nanovoids Enrichment by Atom Probe Tomography

by
Pamela M. Pineda-Domínguez
1,
Torben Boll
2,3,4,*,
John Nogan
5,
Martin Heilmaier
2,
Abel Hurtado-Macías
6 and
Manuel Ramos
1,*
1
Departamento de Física y Matemáticas, Instituto de Ingeniería y Tecnología, Universidad Autónoma de Ciudad Juárez, Avenida del Charro 450 N, Cd. Juárez, Chihuahua 32310, Mexico
2
Institut für Angewandte Materialien-Werkstoffkunde (IAM-WK), Karlsruhe Institute of Technology, Engelbert-Arnold-Strasse 4, 76131 Karlsruhe, Germany
3
Karlsruhe Nano Micro Facility (KNMFi), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
4
Institute for Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
5
Center for Integrated Nanotechnologies, 1101 Eubank Bldg. SE, Albuquerque, NM 87110, USA
6
Laboratorio Nacional de Nanotecnología, Centro de Investigación en Materiales Avanzados S.C., Miguel de Cervantes 120, Complejo Industrial Chihuahua, Chihuahua 31109, Mexico
*
Authors to whom correspondence should be addressed.
Materials 2023, 16(4), 1387; https://doi.org/10.3390/ma16041387
Submission received: 13 January 2023 / Revised: 2 February 2023 / Accepted: 4 February 2023 / Published: 7 February 2023
(This article belongs to the Topic Materials and Surface Treatment Processes Used for Engineering Applications)
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Abstract

Tungsten trioxide (WO3) is a versatile n-type semiconductor with outstanding chromogenic properties highly used to fabricate sensors and electrochromic devices. We present a comprehensive experimental study related to piezoresponse with piezoelectric coefficient d33 = 35 pmV−1 on WO3 thin films ~200 nm deposited using RF-sputtering onto alumina (Al2O3) substrate with post-deposit annealing treatment of 400 °C in a 3% H2/N2-forming gas environment. X-ray diffraction (XRD) confirms a mixture of orthorhombic and tetragonal phases of WO3 with domains with different polarization orientations and hysteresis behavior as observed by piezoresponse force microscopy (PFM). Furthermore, using atom probe tomography (APT), the microstructure reveals the formation of N2-filled nanovoids that acts as strain centers producing a local deformation of the WO3 lattice into a non-centrosymmetric structure, which is related to piezoresponse observations.
Keywords: WO3; films; PFM; APT; nanovoids WO3; films; PFM; APT; nanovoids

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MDPI and ACS Style

Pineda-Domínguez, P.M.; Boll, T.; Nogan, J.; Heilmaier, M.; Hurtado-Macías, A.; Ramos, M. The Piezoresponse in WO3 Thin Films Due to N2-Filled Nanovoids Enrichment by Atom Probe Tomography. Materials 2023, 16, 1387. https://doi.org/10.3390/ma16041387

AMA Style

Pineda-Domínguez PM, Boll T, Nogan J, Heilmaier M, Hurtado-Macías A, Ramos M. The Piezoresponse in WO3 Thin Films Due to N2-Filled Nanovoids Enrichment by Atom Probe Tomography. Materials. 2023; 16(4):1387. https://doi.org/10.3390/ma16041387

Chicago/Turabian Style

Pineda-Domínguez, Pamela M., Torben Boll, John Nogan, Martin Heilmaier, Abel Hurtado-Macías, and Manuel Ramos. 2023. "The Piezoresponse in WO3 Thin Films Due to N2-Filled Nanovoids Enrichment by Atom Probe Tomography" Materials 16, no. 4: 1387. https://doi.org/10.3390/ma16041387

APA Style

Pineda-Domínguez, P. M., Boll, T., Nogan, J., Heilmaier, M., Hurtado-Macías, A., & Ramos, M. (2023). The Piezoresponse in WO3 Thin Films Due to N2-Filled Nanovoids Enrichment by Atom Probe Tomography. Materials, 16(4), 1387. https://doi.org/10.3390/ma16041387

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