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Journal: Materials, 2023
Volume: 16
Number: 1104

Article: The Effect of Nitridation on Sputtering AlN on Composited Patterned Sapphire Substrate
Authors: by Yi Zhang, Guangmin Zhu, Jiangbo Wang and Zichun Le
Link: https://www.mdpi.com/1996-1944/16/3/1104

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