Order Article Reprints

Yang Z, Wei X, Roy P, Zhang D, Lu P, Dhole S, Wang H, Cucciniello N, Patibandla N, Chen Z, et al. CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 mm Si Wafer. Materials. 2023; 16(23):7468. https://doi.org/10.3390/ma16237468

Yang, Zihao, Xiucheng Wei, Pinku Roy, Di Zhang, Ping Lu, Samyak Dhole, Haiyan Wang, Nicholas Cucciniello, Nag Patibandla, Zhebo Chen, and et al. 2023. "CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 mm Si Wafer" Materials 16, no. 23: 7468. https://doi.org/10.3390/ma16237468

Yang, Z., Wei, X., Roy, P., Zhang, D., Lu, P., Dhole, S., Wang, H., Cucciniello, N., Patibandla, N., Chen, Z., Zeng, H., Jia, Q., & Zhu, M. (2023). CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 mm Si Wafer. Materials, 16(23), 7468. https://doi.org/10.3390/ma16237468