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Journal: Materials, 2023
Volume: 16
Number: 5849
Article:
Super High-Concentration Si and N Doping of CVD Diamond Film by Thermal Decomposition of Silicon Nitride Substrate
Authors:
by
Yong Yang, Yongnian Wang, Huaxin Yan, Chenyi Cao and Naichao Chen
Link:
https://www.mdpi.com/1996-1944/16/17/5849
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