Zhang, S.; Liu, Y.; Li, W.; Cao, J.; Huang, J.; Zhu, L.; Guan, Z.
Numerical Analysis of the Effect of Retaining Ring Structure on the Chemical Mechanical Polishing Abrasive Motion State. Materials 2023, 16, 62.
https://doi.org/10.3390/ma16010062
AMA Style
Zhang S, Liu Y, Li W, Cao J, Huang J, Zhu L, Guan Z.
Numerical Analysis of the Effect of Retaining Ring Structure on the Chemical Mechanical Polishing Abrasive Motion State. Materials. 2023; 16(1):62.
https://doi.org/10.3390/ma16010062
Chicago/Turabian Style
Zhang, Siqi, Yiran Liu, Weimin Li, Jun Cao, Jiaye Huang, Lei Zhu, and Zijun Guan.
2023. "Numerical Analysis of the Effect of Retaining Ring Structure on the Chemical Mechanical Polishing Abrasive Motion State" Materials 16, no. 1: 62.
https://doi.org/10.3390/ma16010062
APA Style
Zhang, S., Liu, Y., Li, W., Cao, J., Huang, J., Zhu, L., & Guan, Z.
(2023). Numerical Analysis of the Effect of Retaining Ring Structure on the Chemical Mechanical Polishing Abrasive Motion State. Materials, 16(1), 62.
https://doi.org/10.3390/ma16010062