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Journal: Materials, 2022
Volume: 15
Number: 7373
Article:
Comparison of the Material Quality of AlxIn1−xN (x—0–0.50) Films Deposited on Si(100) and Si(111) at Low Temperature by Reactive RF Sputtering
Authors:
by
Michael Sun, Rodrigo Blasco, Julian Nwodo, MarÃa de la Mata, Sergio I. Molina, Akhil Ajay, Eva Monroy, Sirona Valdueza-Felip and Fernando B. Naranjo
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