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Journal: Materials, 2022
Volume: 15
Number: 6918

Article: Selective Etching of Si versus Si1−xGex in Tetramethyl Ammonium Hydroxide Solutions with Surfactant
Authors: by Yongjoon Choi, Choonghee Cho, Dongmin Yoon, Joosung Kang, Jihye Kim, So Young Kim, Dong Chan Suh and Dae-Hong Ko
Link: https://www.mdpi.com/1996-1944/15/19/6918

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