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Journal: Materials, 2022
Volume: 15
Number: 6918
Article:
Selective Etching of Si versus Si1−xGex in Tetramethyl Ammonium Hydroxide Solutions with Surfactant
Authors:
by
Yongjoon Choi, Choonghee Cho, Dongmin Yoon, Joosung Kang, Jihye Kim, So Young Kim, Dong Chan Suh and Dae-Hong Ko
Link:
https://www.mdpi.com/1996-1944/15/19/6918
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